晶片及光伏电池检测分析.ppt

WARP definiens: Warp=the difference between the maximum and minimum distances of the median surface of a free, unclamped wafer from a reference plane. Median surface =the locus of points in the wafer equidistant from the front and back surfaces. The reference plane =3-point backside of wafer The equation: Warp=[(b－a)max－(b－a)min ]/2 TTV definiens: Total Thickness Variation (TTV) = The difference between the max. and min. values of the thickness of the wafer BOW definiens: Bow is calculated by measuring the deviation of the center point of the median surface relative to a reference plane TTV, BOW / WARP Thickness and Resistivity Theory II ?= T/X ?(Resistivity) = T(Thickness)/X(Conductance) Resistivity measurementwith Eddy current technique An AC current flows in a coil in close proximity to a conducting material. The magnetic field of the coil induces circulating (eddy) currents in the sample. The eddy current measurement is actually the measurement of the electrical loss in the material, which depends on the resistivity. LBIC - Reflectance Measurement光诱导电流－反射率 测试 High speed, high resolution method for the characterization of defect distribution and thus the conversion efficiency of silicon solar cells. Available wavelengths: 403, 635, 670, 780, 820, 870, 900, 920, 950, 980 and 1015 nm LBIC-Light Beam Induced Current（光诱导电流的测试）  Semilab’s LBIC-Reflectance setup Multiple wavelength laser capability: 650 - 1015 nm* Up to 200x200mm area mapping High resolution: 100μm Adjustable light intensity Reflectance measurement for Internal Quantum Efficiency determination Separated direct and scattered reflection measurement Reflected light is detected up to an angle of 60o *400nm (blue) laser is optional LBIC-Reflectance setup（光反射率的测试） By the combined application of multiple wavelengths LBIC and reflectance measurement high resolution quantum efficiency maps of solar cells are provided by the WT-2000. LBIC REFLECTANCE LBIC map of a multicrystalline s