微型薄膜电阻的制备及研究-电子器件.pdfVIP

绗?8鍗 绗?鏈 鐢 瀛 鍣 浠 Vol饊啺38 No.6 2015骞?2鏈 ChineseJournalofElectronDevices Dec. 2015 PreparationandResearchofMicroFilmResistor* ZHAOLong锛孌UANJunping锛孼HANGBinzhen 锛孋UIJianli* 锛圫cienceandTechnologyonElectronicTestMeasurementLaboratory锛孨orthUniversityofChina锛孴aiyuan030051,China锛 Abstract锛欳ompositewasmixingwiththecarbonnanotubes锛圕NTs锛塧ndnegativephotosist锛圫U-82002锛?Thecarbon nanotubesofdifferentproportionsweredispersedintoSU- 8 2002锛宐ymeansofusingultrasound锛宼hemeanswas foundtopreparethemicroresistorquicklythroughUV-LIGA锛宲rocessingtechnicandhot-pressed.Resistorperfor鈦 mancewastestedofthecompositemembrane.Theexperimentalresultsshowthatresistivityincreasedwiththein鈦 creaseofratioofcarbonnanotubes锛寃hentheconcentrationofCNTsinthecompositewasreducedbelow 12%锛宼he resistivityreducingto 0.06惟鈭檓 锛宲ercolationthresholdwasoccurredofthecomposite锛宼hechangeofresistorwith frequencyunder 1.2GHzislessthan5%.Provideanewmethodforquickpreparationofasimplemicroresistor. Keywords锛歝omposite锛沵icro-resistor锛沨ot-pressed锛況esistivity EEACC锛?120锛?520 doi锛?0.3969/j.issn.1005-9490.2015.06.006 寰瀷钖勮啘鐢甸樆鐨勫埗澶囧強鐮旂┒* 璧 榫欙紝娈典繆钀嶏紝寮犳枌鐝 锛屽磾寤哄埄* 锛堜腑鍖楀ぇ瀛︾數瀛愭祴璇曟妧鏈噸鐐瑰疄楠屽锛屽お鍘?30051锛 鎽 瑕侊細灏嗗叿鏈変紭寮傜壒鎬х殑纰崇撼绫崇锛圕NTS锛変笌璐熸€ф劅鍏夎兌锛圫U-82002锛夋贩鍚堝緱鍒板鍚堟潗鏂欙紝灏嗕笉鍚屾瘮渚嬬殑纰崇撼绫崇閫氳繃瓒呭０ 宸ヨ壓鍒嗘暎鍒癝U-82002鎰熷厜鑳朵腑锛岄€氳繃UV-LIGA鍔犲伐宸ヨ壓锛岀儹鍘嬪鐞嗗悗瀹炵幇浜嗗井鍨嬬數闃荤殑蹇€熷埗澶囥€傚澶嶅悎钖勮啘鐢甸樆鐨勬€ц兘 杩涜娴嬭瘯锛屾祴璇曠粨鏋滆〃鏄庡鍚堣杽鑶滅數闃荤巼闅忕潃纰崇撼绫崇姣斾緥鐨勫鍔犺€屽噺灏忥紝褰撶⒊绾崇背绠＄殑姣斾緥涓?2%鏃讹紝鐢甸樆鐜囧噺灏忓埌0.06 惟鈭檓 锛屽鍚堟潗鏂欒揪鍒伴€炬笚闃堝€硷紝棰戠巼灏忎簬1.2GHz鏃讹紝鐢甸樆鍊肩殑鍙樺寲鑼冨洿灏忎簬5%锛屼负蹇€熷埗澶囧井鍨嬬數闃绘彁渚涗簡鏂扮殑鏂规硶銆 鍏抽敭璇嶏細澶嶅悎鏉愭枡锛涘井鍨嬬數闃伙紱鐑帇锛涚數闃荤巼 涓浘鍒嗙被鍙凤細TB332 鏂囩尞鏍囪瘑鐮侊細A 鏂囩珷缂栧彿锛?005-9490锛?015锛?6-1240-05 鏃ユ湰绉戝瀹?0澶氬勾鍓嶅湪鍒跺纰崇氦缁寸殑瀹為獙杩 姹傝緝楂橈紝宸ヨ壓鐩稿澶嶆潅锛岃€屾祮鏂欐硶鍒跺鐨勭數闃讳綋绉 锛?锛 绋嬩腑棣栨鍙戠幇浜嗙⒊绾崇背绠★紙CarbonNanotube锛 锛岀⒊