激光光栅显微投影法表面微观形貌测量系统的研制.pdfVIP

24 3 Vol. 24 ,No. 3 2004 6 J une 2004 Ξ A P PL I ED L AS ER 1 2 1 (1 300072 ;2 250061)  ,CCD ,, ,, ; CCD ,CCD , ,  Development of Micro - topography Measurement System Based on Laser Grating Micro - Projection Method 1 2 1 Yu Fusheng Si Shuchun Zhang Guoxong (1 S tate Key L aboratory of Precision Measuring Technology and Inst rument , Tianjin U niversity , Tianjin 300072 ; 2College of M athem atics and Physics , S handong U niversity Jinan 250061) Abstract A micro - topography measurement system based on the laser grating micro - projection method was developed in this paper. This instrument was composed of a chip of laser tube ,a CCD camera , two object lenses of a microscope , a set of image card , a computer and data processing software. One of the two object lenses was used to project the reduced shadow of the laser grating onto the surface of the measured object in order to provide the stripes which be modified with the height of the surface , and the other lens was used to transform the image of the modified stripes onto the target of the CCD camera. Then the collected image data by image card was imported into the computer and the computer got the micro - topography of the measured surface. The method about how to calculate the measurement scope and the resolving power of this system were introduced and the reliability of the measurement data was analyzed in this paper also. The results showed that the micro - topography measurement system based on laser grating micro - projection method is reliable to measure the micro - topography. Key words laser grating m