原创力文档基于倏逝波干涉的亚波长光栅制作方法分析-analysis of fabrication method of subwavelength grating based on evanescent wave interference.docxVIP
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基于倏逝波干涉的亚波长光栅制作方法分析-analysis of fabrication method of subwavelength grating based on evanescent wave interference
ABSTRACTEvanescentwaveinterferencelithography(EWIL)isabletomanufactureperiodicsub-wavelengthgratingandmicrostructuresbytheinterferenceofevanescentwavewithoutmask.Becauseevanescentwavewithahigherspatialfrequencycanbreakthroughλ/2interferencelimitforfreespace,EWILhaswiderangeofapplicationintheultraprecisionlithographyarea.Inthiscontext,thispaperfocusontheanalysisofsub-wavelengthgratingsfabricatingbasedonevanescentwaveinterference.Firstofall,thisarticlediscussestheessentialsignificance,characteristicsandgenerationmethodofevanescentwave,whichevanescentwavewillquicklydecayexponentiallyinthetransmis
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