CUSP磁场对8英寸半导体级硅晶体生长影响(晶体生长建模软件FEMAG).ppt

FEMAGSoft ? 2012 PERSPECTIVES What FEMAGSoft can do: All the required simulation work is possible. However this work has to be performed very carefully in order to guarantee that exact quantitative results are obtained All the required model improvements are available. However the associated material data have to be cross-checked and validated and this requires a very high expertise As a general conclusion, the CUSP effect is very encouraging for the oxygen distribution in the crystal. Further simulations will be more specific and quantitative if associated to a calibration process based on your customer set-up. * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * 晶体生长建模软件FEMAG --CUSP磁场对8英寸半导体级硅晶体生长的影响 Report Bruker ASC Feb, 9, 2012 FEMAGSoft ? 2012 FEMAGSoft ? 2012 OBJECTIVE PROCESS CONDITION CZ furnace - 8 inch diameter crystal, 24 inch diameter crucible To predict the impact of a CUSP magnetic field operating at 140 A with the neutral-axis located on the melt free surface. SIMULATION PROCESS The growth process is modeled as Time dependent simulation taking in to account the transient effects taking place during the growth of the crystal PARAMETERS OBSERVED The concentration of the Oxygen in the melt and crystal. The concentration of the Phosphorous in the melt and crystal The concentration of the Carbon in the melt and crystal FEMAGSoft ? 2012 CRYSTAL RADIAL OXYGEN MEASUREMENT POSITIONS FEMAGSoft ? 2011 PREDICTION OF RADIAL OXYGEN CONCENTRATION FEMAGSoft ? 2012 PREDICTION OF RADIAL OXYGEN CONCENTRATION FEMAGSoft ? 2012 PREDICTION OF OXYGEN CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL FEMAGSoft ? 2012 PREDICTION OF CARBON CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL FEMAGSoft ? 2012 PREDICTION OF PHOSPHOROUS CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL FEMAGSoft ? 2012 CUSP vs NOCUSP - OXYGEN CONCENTRATION - CRYSTAL FEMAGSoft ? 2012 CUSP vs NOCUSP - CARBON CONCENTRATION - CRYSTAL FEMAGSoft ? 2012 CUSP vs NOCUSP - PHOSPHOROUS CONCENTR