气浮直线电机动块设计及实现.doc

气浮直线电机运动模块设计及实现 摘要 随着先进制造技术的发展，各种现代制造工艺不仅要求装备具有更高的运动性能高速度、高加速度、高精度，而且要求制造装备能够满足苛刻的生产环境高洁净、无污染，而在各种高性能的制造和检测装备中，决定设备性能的就是各种运动平台，因此设计开发mm，最大加速度为2~10g。本文在提出系统方案的基础上，进一步设计了系统硬件之间的电气连接图，把系统连接为一个整体，实现电信号的传递。同时设计了一款静压气浮导轨，将运动滑块牢牢的连接在电机的动子上，并在滑块与导轨之间实现静压气浮支撑，使得平台的定位精度得到了极大的提升，进而支持了系统对高精度，高加速度的要求。 关键字：气浮；直线电机；运动平台 Design of Air Bearing Motion Module Driven by Linear Motor Abstract With the development of advanced manufacturing technology, more rigorous requires are required by many manufacturing process, and trenchant environments should be satisfied by manufacturing equipments. Among the high-performance manufacturing and inspection equipment, what determine the equipment performance are kinds of locomotion platforms. So it has been the basic work and the top priority to design and do research on new generation high-performance dynamic systems for developing high energy equipment. This paper designs a system of airfioatation linear motor, the locomotion platform combines the linear motor and static air pressure lead rail technology, adopts the most ideal open numerical control system and high precision components which to finish the exercise of precise control. The system can achieve the level of micron, the stroke of the system is from 250 to 1000mm and the acceleration from 2 to 10g. This article designs further a circuit in hardware on the base of the basic system, the system is connected to a entirety, realizes the transfer of electric signals. It also designs a static air pressure lead rail to connect the dynamic module to the motor rotor, and achieves the static pressure airfioatation strut between the slide and lead rail, the accuracy of the platform positioning has been greatly improved, and the requires of high-precision and high acceleration are achieved. Keywords: Airfioatation; linear motor; locomotion platform 目录 1.绪论 1 1.1课题背景 1 1.2课题的目的意义 2 1.3课题的主要内容 2 2.系统总体设计 4 2.1系统总体技术指标 4 2.2系统总体技术方案 4 2.2.1执行器类型选择 4 2.2.2控制系统类型选择 6 2.2.3位移传感器类型选择 8 2.2.4精密气浮平台技术简介 8