SEMI标准介绍：SECS-GEM.pdfVIP

Introduction to the SEMI Standards: SECS/GEM October 30, 2017 - NOTICE - The information contained in this document is subject to change without notice. Every effort has been made to supply complete and accurate information. However, Cimetrix Inc. makes no warranty of any kind with regard to this document, including, but not limited to, the implied warranties of merchantability and fitness for a particular purpose. Cimetrix shall not be liable for errors contained herein or direct, indirect, special, incidental, or consequential damages in connection with the furnishing, performance, or use of this document. - COPYRIGHT - ©2017 Cimetrix Incorporated. All rights reserved. No part of this work may be copied, modified, distributed in any form or by any means, or stored in any database or retrieval system, without the prior written permission of Cimetrix Incorporated, except as permitted by law. Violation of copyright carries civil and criminal penalties. - TRADEMARKS - Cimetrix is a registered trademark. CIM300, CIMConnect, CIMFoundation, CIM40, CIM87, CIM90, CIM94, CIM58, CIM116, CIM148, CIM157, SECSConnect, ECCE Plus, TESTConnect, CIMPortal, CIMPortal Plus, EDAConnect, and CIMControlFramework (CCF) are trademarks of Cimetrix Incorporated. All other registered trademarks and trademarks are properties of their respective holders. Introduction to the SEMI Standards: SECS/GEM Page 2 of 14 Table of Contents 1  Overview 4  2  Industrial Usage of the GEM Standard 4  2.1  Semiconductor Front End 4  2.2  Semiconductor Back End 4  2.3  Flat