薄膜物理课件.pdf

Thin Film Physics 2015 Fall, USTC 翟晓芳 xfzhai@ustc.edu.cn • 参考书： “Thin-Film Deposition: Principles and Practice” by Donald L. Smith, McGraw - Hill, Inc Chapters • 1: Introduction to thin film technology • 2: Gas kinetics • 3: Vacuum technology • 4: Evaporation • 5: Deposition • 6. Thin film deposition methods • 7. Electron, photon, and neutron techniques for examining surfaces and thin films • 8. Thin film device processing • 9. Contemporary thin film research and applications Chap.1 : Introduction 1.1 Applications 1.2 History 1.3 Process step 1.4 Examples 1.1 Applications • Why thin film ? Thin films are deposited onto bulk materials (substrates) to achieve properties unattainable or not easily attainable in the substrates alone. • What properties are required for the application at hand? Thin-film property Typical applications category Optical Reflective/antireflective coatings; Memory disks Interference filters; Waveguides; Metamaterials Electrical Insulation; Conduction; Semiconductor devices; Piezoelectric drivers Magnetic Memory discs Barriers to diffusion or alloying ; Chemical Protection against oxidation or corrosion; Gas/liquid sensors Mechanical Hardness, Adhesion, Micromechanism (MEMS) Thermal Barrier layers; Heat sinks Thin-films discussed in this lecture are: (1) from vapor phase deposition (2) contrary to thick films Comparison between thin and thick films Thin films: deposition of single molecules Thick films: deposition of partic