基于表面等离子激元的双金属光栅结构提高LED光提取效率的研究.pdf

第34卷摇 第12期 发摇 光摇 学摇 报 Vol郾34 No郾12 2013年12月 CHINESEJOURNAL OF LUMINESCENCE Dec. ,2013 文章编号:1000鄄7032(2013)12鄄1624鄄07 基于表面等离子激元的双金属光栅结构 提高LED光提取效率的研究 * 王志斌,张摇 骞 ,张摇 健,刘丽君 (燕山大学 电气工程学院,河北 秦皇岛摇 066004) 摘要:为了提高GaN基LED的光提取效率,构建了一种在金属银膜上下表面分别刻蚀光栅结构的双光栅 LED模型。 利用时域有限差分法(FDTD)进行数值模拟,比较了无银膜、无光栅、单光栅、双光栅模型下LED 的光提取效率。 结果表明:在光栅周期为300 nm,占空比为0.23,银膜厚度为30 nm,光源深度为150 nm时, 光提取效率较单光栅结构提高了6倍,较无光栅结构提高了16倍。 关摇 键摇 词:发光二极管;时域有限差分法;光提取效率;表面等离子激元 中图分类号:O472摇 摇 摇 文献标识码:A摇 摇 摇 DOI:10.3788/ fgx1624 Improvement of LED Light Emitting Efficiency by Using Double Metal Gratings * WANGZhi鄄bin,ZHANG Qian ,ZHANGJian,LIU Li鄄jun (College of Electrical Engineering,Yanshan University,Qinhuangdao066004,China) *Corresponding Author,E鄄mail:zhang_ysu@ Abstract:In order to improve the light emitting efficiency of GaN鄄based LED, a double鄄grating structure was established by etching grating on both sides of silver metal film. A numerical simula鄄 tion was conductedusingthefinitedifferencetimedomainmethod (FDTD). Thelight extraction ef鄄 ficiency in different patterns was compared, including without鄄silver鄄film pattern,without鄄grating pattern,single鄄grating pattern and double鄄grating pattern. When the grating period is300 nm,duty cycle is0.23,silver film thickness is30 nm and light source depth is 150 nm,the light extraction efficiency of the double鄄grating structure is improved by 6 times than the single鄄grating structure, and 16 times than the structure without grating. Key words: light emitting diodes; finite鄄differ