微尺度特征结构上褶皱形貌的分析.pdfVIP

ABSTRACT Surface wrinkling covering on soft materials are of growing interest to a number of academic disciplines including soft lithography, metrology and flexible electronics. In this paper, to study how to control the morphology of the surface wrinkles, experiments and simulations have been done. There are three main aspects: controlling of the morphology of the surface wrinkling and the finite element analysis (FEA) of the wrinkle of thin film, fabrication of the micro-grooving