用于超低温环境的轻质反射镜制造技术-中国光学.pdf

第 3 卷 第 5 期 中国光学与应用光学 Vol. 3 No. 5 2010 年 10 月 Chinese Journal of Optics and Applied Optics Oct. 20 10 文章编号 1674-2915( 2010) 05-0494-06 用 于 超 低 温 环 境 的轻 质 反 射 镜 制 造 技 术 陈 亚, 宋淑梅, 宣 斌, 谢京江 ( 中国科学院 长春光学精密机械与物理研究所 光学系统先进制造技术重点实验室, 吉林 长春 130033) 摘要: 以椭圆形平面反射镜实例为研究对象, 介绍了轻质反射镜材料的选择 以及反射镜在真空超低温环境 中的应 用 。分 析了各种轻量化孔的特点, 设计 了一种反射镜结构; 在 吊带支撑方式下, 建立整体结构的有限元模型, 对由于镜体 自重及 超低温环境引起的镜面变形进行了有限元分析 。由数控系统在 图形方式下控制实际轻量化加工, 加工后的反射镜轻量 化率达到 33% ; 采用化学方法消除加工过程 中产生的应 力与微 小裂纹; 运 用环形抛光机 结合局部修磨进行光 学抛光加 工, 抛光后面形精度达到 0. 022 λ( 均方根, λ= 633 nm) ; 在实验室进 行小范围温度拉偏实验, 实验 结果表 明, 面 形精度 变 化量为 0. 03 nm。 关 键 词: 轻质反射镜; 超低温; 轻量化; 数控 中图分类号: TP73; TH703 文献标识码: A Manufacturing technologies of lightweighted mirror applied to vacuum cryogenic environment CHEN Ya, SONG Shu-mei, XUAN Bin, XIE Jing-j iang ( Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 China) Abstract: The design and manufacture of an elliptic mirror used in remote sensing was described in detail. How to choose the materials of a lightweighted mirror was discussed and the applications of the mirror to vacu- um cryogenic environments were introduced. Based on the analyses of effects of different shapes of lightweight- ing holes, the structure of mirror was designed. By supporting the mirror with a belt hanging system, the gravi- ty effect and the ultra low temperature effect were analyzed with a finite-element software. Furthermore, the practical lightweighting manufacture was carried out in the routing function of a computerized numerical control machining system, and the lightweighting ratio of elliptic mirror obtained has exceede