穿透式电子显微镜线距量测之不确定度评价.pdfVIP

5 32 Evaluation for Uncertainties in Line Measurement of Transmission Electron Microscopy Transmission Electron Microscopy ISO Guide to t he Ex pression of Uncertainty in Measurement, G UM Re prod ucibility Non-uniformity of Specimen Line Resolution Point Resolution Uncertainty of Reference Material Temperature Factor Scale Calibration10 nm 99.0 nm 1, 140 nm 3 Abstract Transmission electron mi