超声振荡辅助制备铜基碳纳米管复合电镀层工艺.pdfVIP

复 合 材 料 学 报 第 23 卷 　第 5 期 　　10 月 　2006 年 Acta Materiae Compositae Sinica Vol23 No5 October 2006 ( ) 文章编号 : 1000 385 1 2006 05 0029 05 超声振荡辅助制备铜基碳纳米管复合电镀层工艺 王裕超 , 丁桂甫 , 吴惠箐 , 汪 　红 , 姚锦元 (上海交通大学 微纳科学技术研究院 , 微米纳米加工技术国家重点实验室 , 薄膜与微细技术教育部重点实验室 , 上海 200030) 摘 　要 : 　为解决碳纳米管在铜基体中的分散与结合两个问题 , 运用超声振荡辅助复合电镀制备铜基碳纳米管 (Cu/ CN Ts) 复合镀层 。利用场发射扫描电镜进行观察 , 复合镀层微观表面平整 , 碳纳米管在基体中均匀分散 , 其 与基体结合 良好 。依据实验结果对超声振荡在复合电镀过程中发挥作用的机制给出了初步的解释 。 关键词 : 　碳纳米管 ; 复合电镀 ; 铜基复合镀层 ; 超声振荡 中图分类号 : 　TB333 　　文献标识码 : A Technics research of depositing Cu/ carbon nanotubes composite coating by electroplating with ultrasonic agitation WAN G Yuchao , D IN G Guip u , WU Huiqing , WAN G Hong , YA O J inyuan (National Key Laboratory of Nano/ Micro Fabrication Technology , Key Laboratory for Thin Film and Microfabrication of Ministry of Education , In stit ut e of Micro Nano Science and Technology , Shanghai J iao Tong U niver sit y , Shanghai 200030 , China) Abstract : 　In or der to di sp er se t he carbon nanot ubes (CN Ts) equably in t he compo sit e and develop t he int erconnec tion between CN Ts and t he copp er mat rix , compo sit e elect roplating wit h t he aid of ult ra sonic agit ation wa s em ployed to p rep are t he copp er/ CN Ts compo sit e coatings. SEM wa s u sed to ob serve t heir morp hology . It was verified t hat t he surface of t he compo sit e i s quit e smoot h ; CN Ts are equably di sp er sed t hroughout t he mat rix , and in addi tion , t he int erfacial binding between CN Ts and copp er wa s well . In t hese cases , a brief under st anding o