半导体制备技术简介CH05-(公开课件).pptVIP

Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm Objective List four thermal processes Describe thermal process in IC fabrication Describe thermal oxidation process Explain the advantage of RTP over furnace Relate your job or products to the processes Topics Introduction Hardware Oxidation Diffusion Annealing Post-Implantation Alloying Reflow Definition Thermal processes are the processes operate at high temperature, which is usually higher than melting point of aluminum. They are performed in the front-end of the semiconductor process, usually in high temperature furnace commonly ca