直流辉光放电与射频辉光放电.pdf

direct current (DC) and radio frequency (RF) glow discharges By WenQi LU 9/21/2006 1. glow-to-arc transition dc/ac V i 1. Dark Discharge The regime between A and E on the voltage-current characteristic is termed a dark discharge because, except for corona discharges and the breakdown itself, the discharge remains invisible to the eye. A - B The background ionization stage During the background ionization stage of the process the electric field applied along the axis of the discharge tube sweeps out the ions and electrons created by ionization from background radiation. Background radiation from cosmic rays, radioactive minerals, or other sources, produces a constant and measurable degree of ionization in air at atmospheric pressure. The ions and electrons migrate to the electrodes in the applied electric field producing a weak electric current. Increasing voltage sweeps out an increasing fraction of these ions and electrons. B - C The saturation region Here radiation induces saturation current change If the voltage between the electrodes is increased far enough, eventually all the available