爱德华scrubber高处理量复习过程.pptVIP

The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. ? Edwards Limited 2007 * * * * * * * The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. ? Edwards Limited 2007 ATLAS Product range overview ATLAS range Combustion abatement combined with wet scrubbing stages Suitable for Etch applications Low CoO, user friendly solution Excellent reliability on harshest processes PFC gas abatement capability The content of this prese