二次配系统简介.pdf

半导体知识厂务讲座 (HOOK UP 简介 ) Secondary process system introduction Working characteristics 1. Wafer factory 2 . Fab features and capabilities of the gas required 3 . Chemical substances and their properties required for fab 4 . Work contents 1. Wafer factory FABis a modern plant producing chips, the main workplace for the cleanroom. Clean room is a constant temperature and humidity, temperature is 21 c°. Relative humidity 65%. Fab clean rooms divided into the diffusion