32s红外椭圆偏振测试技术.pptVIP

SENDIRA Infrared Spectroscopic Ellipsometer Basics The ellipsometer measures in reflection mode the optical response of a sample using polarized light. The sample properties change the polarization state of the reflected light. Amplitude ratio and phase difference of the Fresnel reflection coefficients r p and r s are used to investigate material composition, molecule orientation, film thickness and optical constants of single films and layer stacks. Benefits of SENDIRA IR spectroscopic ellipsometer Measures two parameters: amplitude ratio and phase differences Sensitive to mono layers and molecule orientation Easy sample preparation, no reference sample required Combines SE with R and T measurements Large sample analysis, mapping capabilities Measurement principal of FT-IR ellipsometer A( α 1 ) P( α 2 ) = ± 45 ° Interferometer Ellipsometer Fourier transformation Interferogram Source Compensator Polarizer Sample Analyzer Detector Single beam spectra Ellipsometric Parameters ? ( ? ), ? ( ? ) IR spectroscopic ellipsometer SENDIRA Ellipsometer set-up 1: Transmitter arm of ellipsometer 2: Receiver arm of ellipsometer 3: Height and tilt adjustable sample stage 4: Auto-collimating telescope and microscope for accurate sample alignment 5: Motorized goniometer 1 2 3 4 5 4 IR spectroscopic ellipsometer SENDIRA ? Wavelength range: 400 cm-1 – 6000 cm-1 ? Separate ellipsometer optics, ellipsometer uses external port of FT-IR instrument ? Complete accessible FT-IR spectrometer ? Large samples, maximal sample size 200 mm diameter, maximal sample height 8 mm ? Ellipsometric, transmission and reflection measurements with polarized light ? Variable incident angle of light (VASE) ? SENTECH comprehensive software for spectroscopic ellipsometry SpectraRay Key features IR spectroscopic ellipsometer SENDIRA SENTECH‘s