SEMI F20-2006 E2006 国外国际规范.pdf

SEMI F20-0706E SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available at in June 2006 and on CD-ROM in July 2006. Originally published 1995; previously published March 2005. E This standard was editorially modified in October 2006 to correct a section numbering error. Changes were made to Appendix 1, § A1-2. 1 Purpose 1.1 The purpose of this specification is to define the metallurgical cleanliness requirements and material composition of 316L stainless steel required for use in the manufacture of components for general purpose, high purity, and ultra-high purity chemical (gas or liquid) distribution systems. 2 Scope 2.1 This specification defines the requirements for 316L stainless steel bar, forgings, and extruded shapes as specified in ASTM A 276, plate stock as specified in ASTM A 240, and tubing as specified in ASTM A 269 and ASTM A 632, for use in the manufacture of components used in general purpose and high purity chemical (gas or liquid) distribution systems in semiconductor manufacturing facilities. NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use. 3 Referenced Standards and Documents 3.1 ASTM Standards 1