[课件资料]TLM测量计算方法来评价欧姆接触.pdfVIP

TLM S L12 L23 L34 L45 W 1 2 3 4 5 Rs d Rsk Rsh RC RC 1 L12L23L34L45 L56R12R23R34R45R56 2 Lµm RΩ 2RCRsh W RC 3 13 R13Re13=(R12+R23-R13)/2 24 R24 Re24=(R23+R34-R24)/2 35 R35Re35=(R34+R45-R35)/2 Re13Re24Re35