第章原子探针场离子显微镜.pdfVIP

1 2 3 X 4 5 6 7 8 123 4 123 1 2 3 1 2 3 6 (APFIM) (FEM)(FIM) (0.20.3nm) 1081010Pa APFIM APFIM (1) (2) (1) (2) (3) (4) — (5) (6) (7) () l00nml0mm (1) (2) (3) 200nm (4) (5) 330h (1) X- ; (2) X- ; (3)