微纳电子材料与工艺样例.pptxVIP

Reviewed by: Zheyuan Chen Prepared by: Zheyuan Chen Jingwen Han Xiao Du Wenjie Li;1. Introduction of TCO 2. Conductive principle of TCO 3. Optical properties of TCO 4. Applications and development of TCO;1.1 Transparent conductive thin film; refers to oxide, nitride, fluoride with properties of transparent and conductive a. Oxide(Nitride): In2O3、SnO2、ZnO、CdO、TiN b. Doped oxide: In2O3:Sn (ITO)、ZnO:In (IZO)、ZnO:Ga (GZO) ZnO:Al (AZO)、SnO2:F、TiO2:Ta c. Mixed oxide: In2O3-ZnO、CdIn2O4、Cd2SnO4、Zn2SnO4;1.2 History of TCO; 1. Introduction of TCO; ITO when In2O3/SnO2 = 90/10(mass fraction), ?? The lowest resistance ratio and the highest light transmittance;ITO when In2O3/SnO2 = 90/10(mass fraction),?? Fastest etching rate;1.4 ZnO series ;1. Introduction of TCO 2. Conductive Principle of TCO 3. Optical properties of TCO 4. Applications and development of TCO;2.1 Conductive Principle 　 (n-type TCO)-- ITO;The conductivity of the material σ σ = neμ n： carrier density (consist of electrons holes ) e：carrier quantity μ：carrier mobility;Carrier mobility (μ) μ = eτ/εom* τ：relaxation time (the time of one scattering to the next scattering) m*：The effective mass of the carrier εo： The dielectric constant in vacuum ?? To increase carrier mobility ? τ↑： related to the TCO film structure. The less defect the bigger τ.(extrinsic effect) ? m*↓： depends on TCO material.(intrinsic effect);2.2 Surface Resistance ;2.3 We can’t have our cake and eat it too!;1. Introduction of TCO 2. Conductive principle of TCO 3. Optical Properties of TCO 4. Applications and development of TCO;3.1 Optical Properties;To reduce the resistivity ofIn2O3、SnO2、ZnO,usually add a dopant such as Sn、Al、Sb to improve the density of the carrier. 　 The increase in carrier density will affect the transmittance. plasma frequence ω = (4πne2/m*)1/2;Sb2O5 precipitation,