SMC高真空元件 高真空阀 铝制高真空L型阀气控型／带电磁阀常闭／波纹管密封CE对应品XLAV-Q(语言 英文)说明书用户手册.pdf

CMC XL 闪 闪闪 闪闪 一 GCMHOOO14 人 High Vacuum 节 Type Valve (with solenoid valve type) (Bellows Sea]) Operation Manual 又 LAV-# 灯 -冰冰 炒 -Q Thank you for purchasing SMC product. For appropriate operation of thls product, please read thls operation manual thoroughjly to understand. Also, refer to the drawing, product lnformation for Structure and specification of this product, Confirm operating environment 1s withlin speclfacatlons. Keep this operation manual with care so that lt can be used at any tme. Contents of thlis operation manual 1s Subject to change wlthout notlce. SMC Corporation CONTENTs Specifications 本 生生 生生 生机 生生 计生 训 1-] Majinp yalye ee ] - 乡 P1laot Solenold valve Lv How to gfgeg ee Gongstruction /Operation ee Operation of pilot Solenojid Valve ee 4-1] (1retlt Of jsght and SUrge voltage SUPPreSSOT 4-2 Insertion /Removal of plug CODPReCtOT ee 4-3 Operation of manual OVerrlde Le Safetvy Tngstyuetigng ee 5-1 Vacuum pliplng 生生 生 生生 和 生 生生 生生 生生 下 5-2 Operational atmosphere piping ee 与 -3 Pressure and fluld Le 中 -4 wwltch ss 启 - 方 Wi1lring / (Onnection 和 相 生生 广 -O FEnerglzatlon 二 与 -了 MaintenanCG Malintenance and repjacement of Part 生生 生生 玖 生生 生生 生生 生生 生生 各 6-] Majintenange 0-2 Repjacement of part 生生 玖 交 交 玖 生生 生生 生生 生生 交 生 生生 生生 生计 生生 生生 6-3 Replacement procedure -eeeeeeeeeeeeeeeeeeeenaeeeeeeeeeeeeeeeeeeeeeeeeeeeeeee