原创力文档BS ISO 21360-5-2023 Vacuum technology. Standard methods for measuring vacuum-pump performance Part 5：Non-evaporable getter (NEG) vacuum pumps 真空技术. 真空泵性能测量的标准方法. 第5部分: 非蒸发吸气剂(NEG)真空泵.pdf
BSISO21360-5:2023
Vacuumtechnology-Standardmethodsfor
measuringvacuum-pumpperformance
Part5:Non吃vaporablege忧er(NEG]vacuumpumps
bsi.
BSISO21360-5:2023BRITISHSTANDARD
Nationalforeword
ThisBritishStandardistheUKimplementationofISO21可ιo.c;.202飞
TheUKparticipationinitspreparationwasentrustedtoTechnical
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