ASTM F576-00 美国材料与试验协会标准.pdfVIP

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Designation:F576–00

StandardTestMethodfor

MeasurementofInsulatorThicknessandRefractiveIndex

onSiliconSubstratesbyEllipsometry1

ThisstandardisissuedunderthefixeddesignationF576;thenumberimmediatelyfollowingthedesignationindicatestheyearof

originaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.A

superscriptepsilon()indicatesaneditorialch

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