发布说明n40lp beol模型vse note v2d0 aug2013.pptxVIP

ReleaseNote:

N40LPBEOLModelV2.0TMLD

Aug23,2013

OutlineRevisionReasonsandScopeMx/ELKLayerUpdateALRDLUpdateSiliconCorrelationVersionComparison:RandC

RevisionReasonsandScope(1/3)1.ReflectMxbaselineprocess:(ComparedwithV1.2)Min.W/SofMxRs:targetincreases1%to0.292?/?withcorners+24%/-20%THK:reducedto1450from1500?;

variationspecchangesto+14.5%/-12.5%from+14%/-12%CD:top/bottomwidthchangeto73/45from72/42nmCtotal:targetincreases5%to0.222fF/umwithcorners+12%/-10%Vxheight:reducedto900from1000?IMD?aTHK:changesto225from575?,where?standsforMxlayernumberIMD?dTHK:changesto400from150?;dielectrickchangesto4.3form4.2,where?standsforMxlayernumberDamagelayer:shrinksto4from10nmOtherW/SofMxWidthandIMDx_THKmatrices:modifiedinmetaltables.

RevisionReasonsandScope(2/3)2.ReflectALRDLbaselineprocess:(ComparedwithV1.2)Min.W/SofALRDLRs:targetdecreases13%to0.0183?/?Ctotal:targetincreases13%to0.282fF/?mwithcorners+11%/-9%THK:increasesto15100?from14500?CD:top/bottomwidthchangeto1.8/2.4from1.2/2.2?mOtherW/SofALRDLWidthmatrix:modifiedinthemetaltableViaRVRctarget:TC1/TC2:

RevisionReasonsandScope(3/3)3.AddCco/CfTablesfornewdevices:(ComparedwithV1.2)HVN/PMOSandHVDEMOSdevicesCco/Cftablesarelistedinthefollowingfiles:N40LPV1d0_2d5VIO_HV_NMOS_Cco_Cf.prnN40LPV1d0_2d5VIO_HV_PMOS_Cco_Cf.prnN40LPV1d0_2d5VIO_HV_DEMOS_Cco_Cf.prn

MxLayerUpdate

MxRsFittingwiththeAidofTEMFittingerrorsarewithincriteria

MxRsTrend:Modelvs.SiThemodelischeckedtowellpredictthesiliconRstrend,basedontargetprofiles.

M3-M2-M1CapCorrelationwiththeAidofTEMFittingerrorsarewithincriteria

MxCapacitanceTrend:Modelvs.SiThemodelischeckedtowellpredictthesiliconCtotaltrend,basedontargetprofiles.

CuTHKFittingbyPolynomial:MxFittingerrorsarewithincriteria.Typical

Ch