Infineon Technologies Dresden 技术手册 PE-TiN 技术手册.pdf

Infineon Technologies Dresden 技术手册 PE-TiN 技术手册.pdf

DEPOSITIONANDTREATMENTOFTITANIUMhigher.Fig.1showsastandardTiNlayer(5nm)witha

BASEDBARRIERLAYERSBYMOCVDthickTiNadhesionlayer(10nm)andCVD-Cu.The

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