等离子体模拟培训：二维流体模型与实验空间分布对比.pdfVIP

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Two-dimensionalfluidmodelofan

inductivelycoupledplasmawith

comparisontoexperimentalspatial

profiles

J.D.BukowskiandD.B.Gravesa)

DepartmentofChemicalEngineering,UniversityofCalifornia,Berkeley,California94720

P.Vitello

LawrenceLivermoreNationalLaboratories,Livermore,California94551

~Received22April1996;acceptedforpublication28May1996!

Akeyneedforthedevelopmentandtestingofmodelssuitableforchemicallyactive,low

pressureplasmasisdetailedcomparisonsbe