添加TiN对MoS2基复合薄膜结构和性能的影响.pdfVIP

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添加TiN对MoS2基复合薄膜结构和性能的影响.pdf

添加TiN对MoS2基复合薄膜结构和性能的影响

Abstract:Inthispaper,weinvestigatetheimpactofaddingTiNon

thestructuralandmechanicalpropertiesofMoS2-basedcomposite

thinfilmsthroughdifferenttechniquesincludingaman

spectrometry,scanningelectronmicroscopy(SEM),andatomic

forcemicroscopy(AFM).Ourresultsshowasignificant

improvementinthemechanicalpropertiesofthecompositethin

filmswiththeadditionofTiN.Moreover,ouranalysisofthe

amanspectroscopydatarevealsthattheMoS2-basedcomposite

thinfilmsexhibitenhanced

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