GBT 43662-2024 蓝宝石图形化衬底片标准立项发展报告.docx

蓝宝石图形化衬底片标准立项发展报告

StandardizationDevelopmentReport:PatternedSapphireSubstrate

摘要

关键词：蓝宝石图形化衬底片；半导体材料；氮化镓；外延生长；国家标准；Mini-LED；光刻工艺；标准化

Keywords:PatternedSapphireSubstrate;SemiconductorMaterials;GalliumNitride;EpitaxialGrowth;NationalStandard;Mini-LED;Photolithography;Standardization