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资料资料资料Design_and_Simulation_of_an_MEMS_Capacitive_Pressure_Sensor_With_Multiple_Annular_Cavities.pdfVIP

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资料资料资料Design_and_Simulation_of_an_MEMS_Capacitive_Pressure_Sensor_With_Multiple_Annular_Cavities.pdf

    IEEESENSORSJOURNAL,VOL.26,NO.1,1JANUARY2026171

    DesignandSimulationofanMEMSCapacitive

    PressureSensorWithMultipleAnnularCavities

    YangZhou,XiaohaoLi,MingzhengBao,YuanhuaXie,andKunLiu

    Abstract—Conventionalcapacitivepressuresensors

    (CPSs)areconstrainedbyinherentstructurallimitationsthat

    impedethesimultaneousachievementofhighsensitivityand

    lownonlinearity,significantly

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