Micromachined Fourier transform spectrometer教程.pdfVIP

Sensors and Actuators A 130–131 (2006) 523–530 Micromachined Fourier transform spectrometer on silicon optical bench platform Kyoungsik Yu a,∗, Daesung Leeb , Uma Krishnamoorthy c , Namkyoo Park d , Olav Solgaardb,1 a Korea Electrical Engineering Science Research Institute, Seoul National University, San 56-1, Sillim-dong, Gwanak-gu, Seoul, 151-742, Republic of Korea b Department of Electrical Engineering, Stanfo