酸刻蚀处理对Si(100)和Si(111)上制备CVD金刚石膜的影响.pdfVIP

42 3 () Vol.42 No.3 2011 3 Journal of Central South University (Science and Technology) Mar. 2011 Si(100)Si(111)CVD 1, 2 1 1, 2 1 1 2 (1. 410083 2. 410083) Si(100) Si(111)(HFCVD) X X 3 h Si(100)Si(111)Si(100) Si(111)2 (111)Si(111)(110)2 TG166.3 A 1672−7207(2011)03−0650−08 Effect of acid etching