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The development and application of silicon Neutron Transmutation Doping （NTD） technology in China.pdfVIP

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  • 2017-09-02 发布于湖北
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The development and application of silicon Neutron Transmutation Doping （NTD） technology in China.pdf

    The development and application of silicon Neutron Transmutation Doping （NTD） technology in China.pdf

    Thedevelopmentandapplication ofsiliconNeutron TransmutationDoping(NTD)technologyinChina QiaoChenyang，SunZhiyong，KeGuotu，LuCungang，ShenFeng，ChenHuiqiang (ChinaInstituteofAtomicEnergy，Beijing102413，China) Abstract：TheresearchanddevelopmenthistoryofsiliconNeutronTransmutationDoping(NTD)technologyanditsap— plieationsathomeandabroadraeintroducedinthispaper．TheadvantagesofNTD，compraedwithconventional tech— nologyofdoping，arenarrated．TheprincipleofNTD aswellastheimplementationofthemainproceduresrelatedtoSi

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