电化学微加工技术新进展及关键技术.pdfVIP

1, 2 1 1 1 张 璧 罗红平 周志雄 任莹晖 1. 湖南大学, 长沙, 4 10082 2. 康涅狄格大学, Storr s, CT 06269 : 将电化学加工的原理应用 微加工领域, 具有可加工材料的范围广无宏观加工作用力工具 阴极无损耗加工表面质量好无内应力工艺多样化可实现批量加工和三维加工等许多优点从加工 原理出发, 分析了实现电化学微加工的前提条件从基础理论研究和应用技术研究两 个方面介绍了近 年来国内外在电化学微加工领域的 一些新进展, 总结了实现电化学微加工的关键技术 : ; ; ; : T G662 : 1004 132X( 2007) 12 1505 07 Recent Advances in Electrochemical Micromachining Zhang B 1, 2 L uo H ongp ng1 Zhou Z h x ong1 Ren Y nghu 1 1. H unan U n vers ty , Changsha, 4 10082 2. U n v ers t y o f Co nnect cut, Sto rrs, U SA , CT 06269 Abstract: Elect rochem cal m crom ach n ng( EM M) s a prom s ng mach n ng t echn que n m cro ma- ch n ng appl cat ons, s nce t of fers several adv ant ages w h ch nclude appl cab l t y t o a w de range of mat er als, absence of mach n ng f orces and res dual st resses , no t ool w ear, g ood surf ace f n sh , adapt a- b l t y t o var ou s pro cesses , mass product on , and ab l t y to mach ne com plex 3D m cro f eat ures. T h s paper addressed t he m por tant f act ors t hat w ere necessary fo r ach ev ng EMM based on ts f undamen- t al pr nc ples . It rev ew ed t he recent advances n EMM n t er ms of t s fundamental t heor es and pract - cal appl cat ons. T he paper also pr esent ed t he cr t cal ssues t hat w ere requ red t o real ze EM M and w ere of mport ance t o t he f ut ure development n EM M and t s nf rast ructures. Key words: elect rochem cal m cro mach n ng; m at er al remov al; complex 3D m cro - feature; m cr o to ol elect ro de 0 引言 [ 7] , ,