智慧型窗玻璃显示器材之抗静电及抗反射薄膜制程的研究.docVIP

智慧型窗玻璃之抗靜電及抗反射薄膜製程研究 Anti-static Anti-reflection Processes for Glass Panels of Smart Window Displays 林仁謙 駱榮富 Samuel Lin R.F. Louh 逢甲大學材料與科學工程學系 Tel: 04-2451-7250 x 5314, Fax: 04-2451-0014, E-mail: rflouh@fcu.edu.tw 摘 要 本針對懸浮顆粒式(SPD)智慧型窗玻璃之抗反射及抗靜電性質，探討其原理、光學性質、電性質及微結構。以溶膠凝膠製程在玻璃上形成低折射率的SiO2 薄膜，使與高折射率ITO 薄膜搭配成為良好的抗反射薄膜，在不同熱處理溫度條件及鍍膜層數，研究鍍膜之微結構變化、結晶構造、可見光穿透及光反射、折射率、片電阻等。在玻璃基板上濺鍍ITO 鍍膜與旋鍍二層SiO2 溶膠鍍膜搭配可成為抗反射鍍膜，使可見光反射率降低約4 %，且可見光穿透率增加2.5 %。經由抗反射、抗靜電鍍膜及SPD 可調光元件搭配而成之裝置可使現代窗玻璃成為節能、環境舒適、安全的建材及車輛材料。 關鍵字：Sol-Gel、SPD膜、光穿透、光反射抗反射、抗靜電The paper is focused on the indium tin oxide (ITO) film by sputtering and silica film by sol-gel spin coating process to enhance the anti-reflective and anti-static properties of the smart windows based on suspended particle device (SPD) technology. The sol-gel deposited SiO2 films of low refractive index (RI) match up the ITO film of high RI to produce better anti-reflective coatings on glass substrates. Processing parameters including rapid thermal annealing temperatures and cycles of thin film deposition were considered in terms of the effects of microstructural changes and variation of transmittance/reflectance and sheet resistance of sol-gel derived films. The deposited SiO2/ITO films on the glass substrate have demonstrated an improved anti-reflective coating for the smart window application by decreasing reflectivity of nearly 4% and increasing transmittance of 2.5%. The combined use of anti-static films, anti-reflective films, and SPD films makes the modern windows of controlled light transmission and illumination level capabilities feasible, which have practically offered better performance of energy-saving efficiency, safety, and environmental comfortableness for viewing windows used in the offices, buildings and vehicles. Keywords: sol-gel, suspended particle devices, SPD film, anti-static, anti-reflective, transmittance, thermal treatment 一、前　言 窗玻璃的節能改善一直是產官學界所極力尋求開發的方向。例如Low-E Glass、Solar Control Glass、電致色變玻璃及後來2