MEMS热风速计流固耦合模拟.pdfVIP

第 30 卷 　第 6 期 电 子 器 件 Vol. 30 　No . 6 20 07 年 12 月 　　　 Ch inese J ou r nal Of Elect ro n D evices 　　 D ec . 20 07 3 Fluid2Sol id Cou l in g Simulat ion of M EM S Ther mal Win d Sen sor Z H A N G H ua , S H EN Gua ng2 i n g , WU J i an , Q I N M i ng , H UA N G Qi n g2an ( Key L ab or a tor y of M EM S of M i nist r y of E du c a ti on , Sout h ea st Uni v er si t y , N an j in g 2 10096 , Chin a) Abstr act :Th e article so lves t h e mu lti2 hy sical field s cou li ng roble m du rin g t he fini te2element sim ulation of t hermal wi nd sen sor s b y mean s of set tin g t he flui d2so lid co u li ng su rface s and t he soli d2so lid co u li ng su rfaces wh en a lyi ng AN SYS sof tw ar e to t he fini te2element si mulation of M EM S t hermal wi n d sen sor . Th e sim ulation an d a nal ysi s of t he h eat dist r ib ut ion of t he chi wit h diff ere nt w in d s eed an d it s an gl e coul d fin d ou t some conclu sion s benefi t for t h e chi desi gn . Fu rt her mor e ,t he ex er imen tal measu re ment is ado t ed i n t he u r o se o f ver ifyin g t h e mo del corr ect . Th e r esul t i n dicate s t hat t he ex eri ment al da ta mat 2 ches t he si mu lant one well ,a nd t he er ror betw een t hem i s wit hi n 8 % . Key wor ds :f lui d2so lid cou li ng ;M EM S ;t h er mal w in d sen sor ; si mul at io n ;measur ement E EACC :257 5 3 M EM S 热 风 速 计 流 固 耦 合 模 拟 张 　骅 ,沈广平 ,吴 　剑 ,秦 　明 ,黄庆安 (东南大学 M EM S 教育部重点实验室 ,南京 2 1009 6) 摘 　要 :通过设置流2固耦合面和固2固耦合面 ,采用 AN SYS 软件对 MEM S 热风速计进行了有 限元模