国外顶级pecvd公司的培训ppt.ppt

High Pump Speed High Throughput Upper Limit 10 torr Low Operating Cost Moderate Initial Cost Small to Very Large Size No Oil Sealing Tolerates Particulates, Oxygen, Etchants Requires Mechanical Pump Critical Mechanical Tolerance Bearing Require Cooling and Lubrication Lower limit 10?? torr Noisy Fast Recovery from “Dumping” Fast Start-up Constant Speed Clean (no Oil) Low Operating Cost High Throuput Small to Large Size Sensitive to Particulates Requires Mechanical (Roughing) Pump High RPM (Noise/Vibration) Low Speed for Hydrogen and Helium High Maintenance Cost High Initial Cost High Speed Very High Throughput Clean Low Operating Cost Continuous Mechanical Pumping Not required Small to Large Size Requires Regeneration Requires Periodic Maintenance Requires Ultrapure Helium Hydrogen Can Be Explosive Low Frequency Vibration Some application Limits Chemical Process Equipment 10?? std cc/sec—1cc/10 sec Torque Converter 10?? std cc/sec—3cc/hour Beverage Can End 10?? std cc/sec—1cc/day Vacuum Process System 10?? std cc/sec—1cc/2 weeks IC Package 10?? std cc/sec—3cc/year Pacemaker 10?? std cc/sec—1cc/30 years Product or system Vacuum Process System 10?? std cc/sec—1cc/2 weeks Basic Leak Detection 3/8 IN. 3/8 IN. 3/8 IN. 1 Cubic Centimeter 10?? std cc/sec—1cc/10 sec 10?? std cc/sec—3cc/hour 10?? std cc/sec—1cc/day 10?? std cc/sec—1cc/2 weeks 10?? std cc/sec—3cc/year 10?? std cc/sec—1cc/30 years Leak Rates Basic Leak Detection Basic Leak Detection BOURDON GAUGE TORR 10??? 10? 10? 10?? 10?? 10?? 10?? 10??? 10??? Vacuum Gauges Vacuum Gauges BOURDON GAUGE Vacuum Gauges VACUUM BOURDON GAUGE BOURDON GAUGE CAPACITANCE MANOMETER TORR 10??? 10? 10? 10?? 10?? 10?? 10?? 10??? 10??? Vacuum Gauges Vacuum Gauges SENSOR BODY AND DIAPHRAGM ASSEMBLY ELECTRODE CONNECTIONS CAPACITOR ELECTRODE P? PORT PR PORT (DIFFERENTIAL ONLY) Vacuum Gauges Vacuum Gauges ABSOLUTE EVACUATED AND SEALED DIFFERENTIAL ELECTRODES PR PX P PX P DEMODULATOR SENSOR PREAMP ? 15V SUPPLY AMPLIFIER (D