边界层对三氯氢硅_氢气系统中多晶硅化学气相沉积的影响_英文_.pdfVIP

FLUID FLOW AND TRANSPORT PHENOMENA Chinese Journal of Chemical Engineering, 19(1) 1—9 (2011) Effect of Boundary Layers on Polycrystalline Silicon Chemical Vapor * Deposition in a Trichlorosilane and Hydrogen System 1 2 2 ZHANG Pan (张攀) , WANG Weiwen (王伟文) , CHENG Guanghui (陈光辉) and LI Jianlong (李建隆)2,** 1 Institute of Electronmec