氦质谱检漏仪基础以及大型真空设备的检漏方法.ppt

* * The leak parameters are captured in the H.L.D menus, in order for the software to make the autocal. After recalibration of the leak, it is necessary to capture the new values. * The measurement is not stable for a long period. The analyser cell needs to be reajusted from time to time , generally once a day. This is the automatic calibration (autocal) procedure. It is made with an internal calibrated leak placed inside the detector. The internal calibrated leak needs to be recalibrated, generally once a year. * * * Example 1: Crossover = 10 mbar Roughing speed = 10m3/h Time to reach test mode= (2.3*10/10) * (log 1000/10) = 4.6seconds Example 2: Crossover = 25 mbar Roughing speed = 5m3/h Time to reach test mode= (2.3*10/5) * (log 1000/25) = 7.4seconds * Explanation: 1 gram of water will be at 1000mbar 1.3 liter of water vapor : 1 / 18(massnumber)= 0,0555 x 24 = 1,332 liter At 0,1 mbar 13320 liter of water vapor will escape: 1000 * 1,332 = 0.1 * V V = 13320 liter * * * * * Some mistakes must be avoided in the mechanical construction of a part for an helium leak test. It is also often necessary to prepare parts just before the test. If this is not respected, the method can find leaks when there is no, and vice versa. * Initial quantity of gas = 4000 mbar x 1 liter = 4000 mb.l Final quantity = 3000 mb.l Loss = 1000 mbar.l With a leak of 10-7 mbar.l/s, how many seconds are necessary to evacuate 1000 mbar.liters ? Flow=Pressure x Volume / Time 10-7 = 1000 / time - Time = 1000 x 10+7=10+10 seconds = 2.7e6 hours = 115740 days = 317 years * * * Big leaks : Generally correspond to big problems in the manufacturing processes (missing seal, defective welding …) Industrial leaks : Are typically the size of leaks generally searched for industrial products. We can consider that at 10-7 mb.l/s, a product is leak free. Small leaks : Leaks under 10-7 mb.l/s, this corresponds to very small leaks that can be sometimes not real leaks, but permeation or