利用可调激光二极管来进行光谱调谐.docVIP

利用可调激光二极管进行光谱调节 年级：2011 专业：光学工程 学号：G111201008 姓名：宦君 工作单位：理波光电科技（无锡）有限公司 摘要：Frequency-modulation spectroscopy is a powerful tool that can achieve high sensitivities with a relatively simple experimental setup. Tunable diode lasers, in particular, can make the setup even simpler because they provide a narrow, tunable output that can be easily modulated. As new diode laser wavelengths become available the field of TDLAS (tunable diode laser absorption spectroscopy) will continue to grow rapidly, particularly when combined with nonlinear optical techniques that allow conversion of available wavelengths to the blue,20 UV,21, 22 or far infrared.8 调频光谱是一种强大的工具,可以用一个相对简单的实验装置获得高敏感性。可调谐二极管激光、特别是,可以使它的步骤更为简单,因为它们可以提供一个狭小的、可调的输出,并且可以很容易地调制。随着新型二极管激光波长变得可用TDLAS的领域(可调谐二极管激光吸收光谱)将继续快速增长,尤其是当结合非线性光学技术,允许转换可用的波长蓝、20、21、22紫外线或远红外线8 引言 Tunable diode lasers are ideal for optical spectroscopy because of their narrow linewidths, large tuning ranges and stable outputs. Because they are more compact and rugged than traditional spectroscopic optical sources, 可调谐激光二极管是理想的用于光谱学的一种器件，因为他们有着较窄的线宽，较大的调节范围和比较稳定的输出。因为相比较传统的光谱光源有着更小的体积并且更坚固。 like Ti:Sapphire lasers, dye lasers, color-center lasers, hollow-cathode lamps, and nonlinear systems (e.g. optical parametric oscillators), they have enabled spectroscopic methods to be used not only in laboratory environments but also in the real world. Applications of diode-laser spectroscopy include remote sensing, LIDAR, laser cooling and trapping of atoms,1 frequency standards,2 length standards,3 trace gas detection,4 and process monitoring.5像钛宝石激光器,染料激光器、激光、空心阴极灯色中心,和非线性系统(如光学参量振荡器),他们使光谱方法用于不仅在实验室环境的同时也在现实世界。应用程序的二极管激光光谱学包括遥感、激光雷达、激光冷却和俘获原子频率标准,1,2,3长度标准微量气体检测、4和过程监控5 They can be used to monitor environmentally important species, such as methane, carbon dioxide, and water. In semiconductor manufacturing, they can be used for closed-loop control of deposition processes, including electron-beam, sputtering, molecular-beam epitaxy (MBE), and thermal evap