激光测量技术研究现状与发展趋势.docVIP

授课教师：冯其波 谢 芳 学院：理学院 专业：光信息科学与技术 班级：光科0704班 姓名：杨 涛 （组 长） 颜川力 杨一帆 戴瑞辰 （副组长） 赵晓军 激光测量技术研究现状与发展趋势 提要：激光检测学科发展现状在光电检测领域，利用光的干涉、衍射和散射进行检测已经有很长的历史。由泰曼干涉仪到莫尔条纹，然后到散斑，再到全息干涉，出现了一个个干涉场，物理量（如位移、温度、压力、速度、折射率等）的测量不再需要单独测量，而是整个物理量场一起进行测量。自从激光出现以后，电子学领域的许多探测方法（如外差、相关、取样平均、光子计数等）被引入，使测量灵敏度和测量精度得到大大提高(激光干涉测量技术、激光共焦测量技术、激光三角测量技术)实现的激光干涉仪、激光位移传感器等，可以完成纳米级非接触测量。可以说，超精密加工技术将随着高精密激光检测技术的发展而发展；在此基础上，提出了测量需解决的关键技术及今后的发展方向。Developing Situation of laser detection .In the field of photoelectric detection, there`ve been a long history of making a detection by using the principle of interference, diffraction and scattering of light. Interference field such as Tieman interferometer, Moire fringe, speckle and Holographic interferometry were designed one after another. Form then on, instead of measuring every physical quantity (displacement, temperature, pressure, velocity, refractive index) in turn, people measure the physical field entirely. After the development of laser, a number of detection?methods (heterodyne, correlation, sample averaging, photon-counting) were invented, which lead to the improvement of the sensitivity and accuracy of the detection. People use the laser interferometer and Laser Displacement Transducer?with key technologies of the laser detection to make nano-scaling?non-contact measurement. It is clear that Super Precision Technology?will raise to a new level according to the development of the High Precision?laser detection; take which as the foundation, we advance the key technologies which belongs to the laser detection field, and also development direction??of the field.　　关键词：激光测量，扫描隧道显微镜，激光干涉仪1　测量系统 Q和锁模激光的出现和应用， 要求测量的激光功率已从毫瓦、瓦、千瓦、兆瓦直到千兆瓦以上。激光能量也从毫焦尔逐渐跨过千焦尔。脉冲激光的持续时间也由毫秒、微秒、毫微秒、而缩短至微微秒量级。光谱范围也从紫外、可见、红外扩展到近毫米波段。激光精密测量和某些生物医学方面的研究和应用(如眼科治疗、细胞手术器等)的发展，对激光测量的精度也提出了非常高的要求。 激光检测是一个涉及面广泛，应用又十分活跃的技术领域。它的检测目标包含十分繁多的几何、物理参数。本文只能选择一些代表性的类别，偏重于实用化，尤其是工业应用方面，来介绍分析激光检测的发展与应用概况。选择了激光准直、导向}激光工业检测与控铷