一种分析微悬臂梁大挠度变形的新算法.pdfVIP

2008 27 7 (Transducer and M icrosystem Technologies) 93 * 陆 静, 向 宇, 马晓强 ( , 545006) : , , , , : , ; : , : ; ; ; : TP211 : A : 1000 9787( 2008) 07 0093 03 Novel m ethod for analyzing large deflection * deform ation of m icro-cantilevers LU Jing, XIANG Yu, MA X iao qiang ( D epartm en t of A utom obile Engineering G uangxi U n iversity of T echnology L iuzhou 545006 Ch ina) A bstract: Considering the influence of electrostatic force edge effect, a model is established to analyze the static deformation of a m icro cantilever w ith large deflection, and the control equations are changed to first order nonlinear differential equations about the beam bend ing theory. A sem i analytical sem inum erical m ethod is presented for analyzing m icro cantilever deform ation by m eans of the high precision iterative refinem ent extended hom ogeneous capacity integration m ethod, nonlinear equations solution and increm ental iterative algorithm. Num erical calcu lated resu lts show that them ethod has upper precision and stab ility, wh ich is an effective m ethod to analyze the deform ation of am icro cantilever. Static characteristics show that the pull in voltage decreasesw hen edge effects are considered, and the pu ll in voltage increaseswhen the influence of large deflection is considered. K ey w ord s: m icro cantilever; shooting m ethod; iterative refinem ent extended hom ogeneous capacity integration m ethod; increm ental iterative 0 , , , , , ,