3.3电容式传感器000.ppt

§3.3.1 电容式传感器的工作原理 §3.3.2 电容式传感器的特点 §3.3.3 电容式传感器测量电路 §3.3. 4 电容式传感器的应用 Noncontact sensors Noncontact sensors monitor a target without physical contact: the ability to provide higher dynamic response to moving targets; higher measurement resolution; the ability to measure small fragile parts. noncontact sensors are also virtually free of hysteresis, the error that occurs with contacting devices at the point where the target changes direction. Capacitive sensors Capacitive sensors are noncontact devices used for precision measurement of a conductive target’s position or a nonconductive material’s thickness or density. §3.3.1 电容式传感器的工作原理 3.3.1.1 工作原理及类型 3.3.1.2 变面积型电容传感器 3.3.1.3 变极距型电容传感器 3.3.1.4 变介电常数型电容式传感器 description Capacitive displacement sensors are known for nanometer resolutions, frequency responses of 20 kHz and higher, and temperature stability. They typically have measurement ranges of 10 μm to 10 mm although in some applications much smaller or larger ranges can be achieved. Capacitance is an electrical property that exists between any two conductors that are separated by a nonconductor. The simplest model of this is two metal plates with an air gap between them. The physical structures of capacitive sensors 3.3.1.2 变面积(change area)型电容传感器 differential capacitance sensor 3.3.1.4 变介电常数(change dielectric constant)型电容式传感器 §3.3.2电容式传感器的特点( characteristic ) 优点: 1. 温度稳定性好(good temperature stability) （电容值与电极材料无关；本身发热极小 ） 2. 结构简单、适应性强 3. 动态响应好 (good dynamic response) 4. 可以实现非接触测量、具有平均效应 缺 点(disadvantage)： 1、输出阻抗高(high output impedance)、负载能力差 (poor load capability) 传感器的电容量受其电极几何尺寸等限制，一般为几十到几百皮法，使传感器的输出阻抗很高。因此传感器负载能力差，易受外界干扰影响 。 2、寄生电容(autoeciousness capacitance)影响大 传感器的初始电容量小，而引线电缆电容、电路的杂散电容以及传感器内极板与其周围导体构成的电容等寄生电容却较大，这一方面降低了传感器的灵敏度；另一方面这些电容常常是随机变化的，将使传感器工作不稳定，影响测量精度 。 2. 设计要点 (1). 减小环境温度湿度等变化所产生的影响，保证绝缘材料的绝缘性能 (2). 消除和减小边缘效应 –等位环 (3).消除和减小寄生电容的影响，防止 和减少外界干扰 (4) 尽可能采用差动式电容传感器 §3.3.3 电容式传感器测量电路 (1) 等效电路