a smart single--chip micro--hotplate--based gas sensor system in cmos--technology--—外文文献.docVIP

原文 A Smart Single-Chip Micro-Hotplate-Based Gas Sensor System in CMOS-Technology Abstract This paper presents a monolithic chemical gas sensor system fabricated in industrial CMOS- technology combined with post-CMOS micromachining. The system comprises metal -oxide-covered (SnO2) micro-hotplates and the necessary driving and signal-conditioning circuitry. The SnO2 sensitive layer is operated at temperatures between 200 and 350℃. The on-chip temperature controller regulates the temperature of the membrane up to 350℃ with a resolution of 0.5℃. A special heater-design was developed in order t