利用射频磁控溅射法在柔性衬底上制备ZnO_Zr透明导电薄膜_英文_.pdfVIP

24 　2 　　　　 Vol.24, No.2 2009 4 Chinese Journal of Liquid Crystals and Displays Apr., 2009 Article ID:1007-2780(2009)02-0183-04 abrication of ZnO ∶Zr ilm Deposited on lexible Substrate by R Magnetron Sputtering LIU Han-fa, ZHANG Hua-fu, LEI Cheng-xin, YUAN Yu-zhen, YUAN Chang-kun (School of Physics and Op tic-Electron ic I nf ormation Technology , S handong University of Technology , Zi bo　255049, China) Abstract:Zirconium-doped zinc oxide (ZnO ∶Zr)transparent conducting thin films with high transmittance, low resistivity and good adhesion w ere firstly prepared on w ater-cooled poly- ethylene glycol terephthalate flexible substrates by R magnetron sputtering.X-ray diffraction and scanning electron microscopy show that the ZnO ∶Zr film s are polycrystalline with a hexa- gonal structure and a preferred orientation parallel to the substrate.The low est resistivity ob- tained in our experiment is 1.55×10-3 Ψ·cm.The average transmittance of the film s is over 90%in the w avelength range of the visible spectrum. Keywords:ZnO ∶Zr films;flexible substrates;magnetron sputtering;transparent conducting films CLCnumber:T N304.2;TN304.055　　　Document code:B and low chemical reactivity .In this letter, we 1　Introduction firstly report the preparation and properties of Transparent conducting thin films deposited ZnO ∶Zr films deposited on water-cooled PET on flexible substrates have many applications. substrates by R magnetron sputtering They are widel