波长方法测试光栅平动式光调制器的微间距.pdfVIP

第19 卷 第5 期 传 感 技 术 学 报 V ol. 19 No. 5 2006 年10 月 CHINESE JOURNAL OF SENSORS AND ACT UATORS Oct . 2006 A Wavelength Scanning Method for Measuring Micro Distance of Grating Moving Light Modulator * ZH A N GJ ie , H UA N G Shanglian,ZH A NG Zhihai,S UN J iyong (theKey Laboratory of Op toelectronic Technology and Syste s of the Education Ministry, Chongqing University, Chongqing 400030, China) Abstract: Grating moving light modulator ( GM LM) is a novel MEMS ased mova le diffraction grating, w hich light modulation is completed y changing micro distance etw een the upper surface of the mova le grating and the reflecting surface of the underlying fixed reflector. The micro distance is a key factor to GM LM performance and it is difficult and expensive to measure w ith a common approach. A novel method adopting w avelength scanning is put forw ard and analyzed. Multipeak method is developed to improve measurement accuracy y k multiple. Experiments w ith U4100 spectrophotometer are carried on, w hich indicates that such method is availa le and experiment results are approaching theory analysis. Comparing w ith the result measured y WYKO white light interferometer, the error of demodulated result is a out 1%. More important, ecause of w avelength accounted to calculate micro distance, measurement accuracy is up to nanometer level. Key words: diffraction; grating; w avelength scanning; peak w avelength; grating moving light modulator EEACC:4 90 * 张 洁 , 黄尚廉, 张智海, 孙吉勇 ( , 400030) : MEMS ( Grat ing Moving Light Modulator, GMLM) . GMLM , GMLM . , . : k , . VEECO (h= 1. 24 ) , 1% ; . : ; ; ; :TN76 :A : 004 699( 2006)05 76404 , ( M OEMS, Mi , , croOptoElect