2008复制高精度大光栅盘时支撑板的力学分析.pdfVIP

1 1 Vol. 1 No. 1 2008 12 Chinese Journal of Optics and Applied Optics Dec. 2008 16 4-2915( 2008) 01-0066-04 1, 2 1 1 苏东风 , 续志军 , 韩旭东 ( 1. 中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033; 2. 中国科学院研究生院, 北京 100039) : , , , , , 1 000 mm 40 mm , , 04 , 8% , : 高精度光栅; 挠度;厚度 : TP212. 12; TH 41. 2 : A M echanics analysis of bearing board when reproducing suprem e diam eter and high precision grating 1, 2 1 1 SU Dong-feng , XU Zhi-jun , HAN Xu-dong ( 1. Changchun Institute of Op tics, F ineM echanics and P hysics, ChineseA cademy of Sciences, Changchun 130033, China; 2. Graduate Uni ersity of Ch ineseA cademy of Sciences, B eij ing 100039, China) Abs tract: To reproduce the supreme diameter and h igh precision grating, themechanical properties of bearing board in exposure equ ipment for reproducing grating w as analyzed. By summ ing up themechanical analysis on bearing board into a flexib ility problem, the formula of the relationsh ip betw een flexib ility and th icknessw as deduced by theoretical calculation. On the basis of the formu la, an exposure equ ipmentw ith bearing board in th ickness of 40 mm and diameter of 1 000 mm w as used to reproduce a h igh precision and large diameter th in grating successfu lly, expermi ental results show that the b iggest d iam eter error and un iform ity error of the gra-t ing is 04 and 8% , respectively, wh ich can m eet the requ irement for angle measurement system. K ey w ord s: high precision grating; flexibility;