微机械(MEMS)作业-微粉末注射成型环形齿轮泵.pptVIP

本文观看结束！！！ 祝各位身体健康！万事如意！！ Development of a micro annular gear pump by micro powder injection molding T. GIETZELT, O. JACOBI, V. PIOTTER, R. RUPRECHT, J. HAUSSELT Forschungszentrum Karlsruhe, Institut fu¨ r Materialforschung III, P.O. Box 3640,76021 Karlsruhe, Germany （ ） *List 1. Introduction 2. Design and preparation 3. Methods and procedures 4. Results and discussion 5. Conclusions 1. Introduction Most microparts are made of thermoplastics or in brittle materials like silicon by deep etching. Micro-Metal Injection Molding (Micro-MIM) Micro-Ceramic Injection Molding (Micro-CIM)