无接触式电阻率测试仪厚度测试原理.pdfVIP

Capacitance Sensing Theory Capacitive sensors can be divided into two categories based upon their performance and intended use. High resolution sensors are typically used in displacement and position monitoring applications where high accuracy, stability and low temperature drift are required. Quite frequently these sensors are used in process monitoring and closed-loop feedback control systems. Proximity type capacitive sensors are much less expensive and are typically used to detect the presence of a part or used in counting applications. The following paper describes characteristics of high resolution systems, their operating principle and application. Figure 1: Typical Capacitance Sensor These sensors are used throughout a variety of industries to provide highly stable, accurate measurements of displacement, vibration, position, thickness and runout. Most probes are passive by design, allowing them to be operated in high shock and vibration environments, and at extreme temperatures. Capacitance probes are typically modeled as a parallel plate capacitor. If two conductive surfaces are separated by a distance and a voltage is applied to one of the surfaces, an electric field is created. This occurs due to the different charges stored on each of the surfaces. Capacitance refers to the ability of the surfaces to hold a charge. In a typical sensor system the probe is one of the plates and the target being measured is the other plate. If a constant current is applied, the capacitance change can be monitored as a linear voltage charge related to the distance between the plates. This distance, or gap, is a function of the area of the capacitance sensor according to the following formula : Capacitance = Area X Dielectric/Gap From this relationship, you can see that capacitance is directly proportional to the area of the sensor and the dielectric property of the material between the sensor and target (typically air). The greater the area of the capaci